Front End Processing
SAWATEC AG is a leading Swiss high-tech company founded in 1996.
SAWATEC AG has a wide range of application-oriented instruments, systems and components is used for various processing steps along the entire process chain, offering versatile customer benefit it.
For special customer requirements we also developed custom-made products which transgress into the physical and technical limits and move today’s process boundaries constantly new.
RTP, RTA, RTO,DLI-CVD, DLI-ALD
Annealsys designs and manufactures Rapid Thermal Processing / Rapid Thermal Annealing (RTP / RTA)
DLI-MOCVD / ALD / RTP system for R&D. Deposition and annealing inside the same chamber.
Sputtering ION Beam Polishing, Cold Plasma Surface Activation, Evaporation
Alliance-Concept manufacturing innovative Thin Film Depositions,
Physical Vapor Deposition technologies (PVD),
engineering both Magnetron sputtering and Thermal evaporation, systems.
Yield Engineering Systems, Inc. is known worldwide for supplying quality process
equipment to Semiconductor and related industries, including MEMS,
Medical, BioSensor, Microarray, Nanotech, Hard Disk Drive, and more.
The wafer-scale automated electrochemical Atomic Layer Deposition (eALD) system
is an ideal tool to grow nanomaterials atomic layer by atomic layer by using surface limited
chemical reactions (the phenomenon also known as an under potential deposition).
Although similar to certain degree to more common vacuum Atomic Layer Deposition technique,
eALD offers a number of unique advantages particularly for deposition of superlattices
(for a nonlimiting example,PbTe/PbSe or Bi2Te3/Sb2Te3),
where such superlattices can be grown at a single temperature quickly,
while classical ALD due to different temperatures of depositions of individual materials
require temperature adjustment of the system, resulting in lengthy and not very practical process.
Back End processing
Eutectic Die Attach, Epoxy Die Attach
MRSI Systems is a leading supplier of high precision dispense and assembly
equipment for the microelectronics industry offering systems for the assembly
of Microwave, RF, Optical, 3D, MCM’s and MEM’s devices.
Plasma Cleaning Systems
Yield Engineering Systems (YES) manufactures equipment for a variety of processes
including vacuum curing, plasma cleaning, resist removal, surface modification
Equipment provider for micro, small, and large spot welding machines and electrodes,
as well as ACF bonding and hot-bar soldering equipment.